A Practical Guide to Optical Metrology for Thin Films by Michael Quinten

By Michael Quinten

A one-stop, concise consultant on picking out and measuring skinny movie thickness by way of optical methods.

This sensible publication covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness size, and smooth functions. In so doing, it indicates the features and possibilities of optical thickness choice and discusses the strengths and weaknesses of dimension units in addition to their assessment methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and topic. the most subject of this e-book, the choice of the thickness of a layer in a layer stack through measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses numerous business functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at commercial and educational researchers, engineers, builders and brands excited by all components of optical layer and skinny optical movie size and metrology, method keep an eye on, real-time tracking, and applications.

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